Zhao Wenbo, a scholar from the Tenth Design and Research Institute of the Ministry of Electronics Industry, wrote the article "Development Trends of Pure Water Treatment Technology in Electronics Industry". The article mainly expounds the development trend of pure water treatment technology in the electronics industry in recent years, including pure water quality standards, pure water treatment process and system, equipment, trace detection technology, and recycling of cleaning wastewater, etc. aspect.
1. Pure water quality standard
2. Pure water treatment system
The development of pure water treatment system and water quality requirements in the electronics industry is shown in the following figure:
3. Pure water treatment device
1. As an example, to reduce the load of ion exchange resin and fully intercept the residual particles and microorganisms in pure water, a reverse osmosis device is used as pretreatment.
2. For example, to avoid direct contact with air and prevent secondary pollution of water, the ultrapure water system used in foreign large-scale integrated circuit production adopts the tendency of vacuum degassing tower.
3. For example, to prevent microorganisms from multiplying in the pure water system, an ultraviolet sterilizing device is used, which does not pollute the water quality and can sterilize to the maximum extent.
4. In view of the strict requirements of industrial production on pure water particles and organic matter, membrane separation technology is adopted.
4. Trace detection technology of pure water
1. Direct method: Microscopic inspection, electron microscope inspection, liquid particle counter method, etc.
2. Indirect method: use the clogging degree when the water sample passes through the 0.45 micron filter membrane to indirectly indicate the number of particles in the water.
5. Recycling of pure water for cleaning
For the full content of the article, please read "Development Trends of Pure Water Treatment Technology in the Electronics Industry"
