Spin Coater

Speed accuracy +/- 1 rpm, acceleration range 100~ 10,000 rpm/s, speed range 150~ 10,000 rpm, program 20 groups, each group 5 segments, cavity stainless steel, Vacuum chuck, suitable for 4-inch substrate, optional temperature control cavity to 200 ℃.

Rotation speed 10000 rpm, Acceleration range 100-5000rpm/s, using PTFE cavity and high-brightness LCD screen control, support program-controlled homogeneous Linear dispersion storage.

Small size, reliable motor driver, 12 groups of 1 to 5 program groups, touch display screen, Rotation speed 100-10000, Acceleration 100-10000, suitable for semiconductor, Optical inspection coatings, etc.

Fixed Acceleration, 12 groups of 1 to 5 program groups, touch screen, optional loading diameter 10~100mm, homogenizing time 3000s, suitable for photoresist Spreader, boron coating, etc.

A 4-station Spin Coater for 40mm diameter silicon wafers, each station can operate independently to meet the needs of different silicon diameters. Speed range of stations is wide, soft start can be adjusted, and the glue leveling process is automatically controlled. Touch screen display and control, 12 sets of process parameters can be pre-stored, each set of 5 segments, easy to operate.

Brushless motor, 12000RPM, Rotation speed resolution 1RPM, speed accuracy +/- 1RPM, uniform glue accuracy +/- 1%, Rotation speed Stability +/- 1%, stainless steel cavity, removable and washable, 5 segments can be customized, Chinese and English switching, suitable for substrates of 4 inches and below, Vacuum chuck

0-12000RPM +/- 1rpm Speed accuracy ， +/- 1% gel accuracy, 30000RPM/S ² Maximum Acceleration, 5-segment program can edit 10 steps, vacuum detection interlock to prevent wafer flying off, negative pressure exhaust and independent waste liquid collection, support 4 inch silicon wafer.

Speed range 0~10000rpm, Acceleration 100~5000rpm/s, transparent acrylic cavity design, 7-inch touch screen is easy to operate, and Linear dispersion can be preset.

Miniaturized aluminum alloy structure design, maximum Rotation speed 10000 rpm to ensure film formation uniformity, equipped with 7 inch touch screen can preset 5 segments Linear dispersion, easy to operate and suitable for laboratory use.

Small size, a total of 12 groups of 1 to 5 program groups, LCD screen, four speed controller, optional loading diameter of 10 to 100mm, homogenizing time 0 to 240s, suitable for photoresist Spreader, boron coating, etc.

Glue time 3000S, resolution 0.1S, vacuum input requirements 0.06-0 MPa, vacuum Flow rate 40-100 l/Min, support 100-5000 rpm safe speed limit and 0.1 second time resolution, equipped with 12 sets of programs, weight only 14KG, with vacuum interface.

Rotation speed 0~ 10000rpm, Acceleration 100~ 5000rpm/s, the cavity material is polytetrafluoride, liquid or colloidal material can be coated on silicon wafers, crystals, quartz, ceramics and other substrates to form a thin film, mainly used in photoresist spin coating, bio-foster base production, sol-gel method for producing polymer films and other fields.

The miniaturized design is equipped with 304 stainless steel cavity, the maximum speed is 10,000 rpm, and it supports 5-stage homogeneous Linear dispersion storage, which is suitable for precision coating of substrates with a diameter of ≤ 4 inches.

Power Supply AC200-230V, single phase, 200W;, loading diameter negotiation;, program group 1-5 segments (edit page), 12 groups;, homogenizing time 3000S, resolution 0.1S;, speed range 100-4000RPM; 35 cm pot (can be set 5000-7000 rpm), speed correction Select Kx practice run through A/K to automatically correct Rotation speed, and then return to Kx for use, Acceleration does not have this function or 100-3000RPM/S range, resolution 1RPM/S.

Adopt precision motor with a maximum speed of 10000 rpm, support program-controlled homogenization, can pre-store 5 homogenization Linear dispersion, miniaturized design saves space

The heating method is directly controlled by the film holder itself, the speed is 100-3000 rpm, the acceleration is 100-3000 rpm, the room temperature is~ RT+ 120℃, the rotation torque is 100rpm torque is greater than 1N.m, and the speed is stable, and the room temperature is -120 degrees Celsius.

4.3-Inch true color touch screen, can set up to 10 segments and 10 groups of data, with USB port, can be connected to external keyboard, mouse U disk and other equipment, compact size can be put into the glove box. The motor can be reversed, and can be connected to a wireless mouse and keyboard: the machine can be placed in the glove box, and customers can remotely operate the machine outside the glove box

Reliable motor driver, 12 groups of 1 to 5 program groups, touch display screen, Rotation speed 100-10000, Acceleration 100-10000, suitable for photoresist Spreaders, semiconductors, Optical inspection coatings, etc.

With fast heat exchange (1-3 seconds) and precise temperature control functions, the speed is 100-3000 rpm, the acceleration is 100-3000 rpm, and the room temperature is~ RT+ 150 ° C. The heating method is directly controlled by the tray itself.

Power 150W, reliable motor driver, 12 groups of 1 to 5 program groups, touch display screen, Rotation speed 100-10000, Acceleration 100-10000, suitable for photoresist Spreaders, semiconductors, Optical inspection coatings, etc.

Small size, Power 150W, Reliable motor driver, 12 groups of 1 to 5 program groups, Touch screen, Rotation speed 100-10000, Acceleration 100-10000, suitable for semiconductor, Optical inspection coatings, etc.

Touch screen control, 5 speed, 12 sets of parameters, Acceleration adjustable, homogenizing time 3000S, loading diameter 200mm, Rotation speed 100-4000 rpm, Vacuum chuck, multi-period stepless speed regulation, high torque motor, pneumatic solenoid valve control, widely used.

Maximum support 8 inches, touch screen with program control, PTFE cavity, integrated heating and temperature control function, maximum speed 12000rpm.