| Optical inspection system | Paxing-Runge structure, Roland circular device; Optical inspection focal length -998.8mm |
| Wavelength range | 170~780nm(Vaccum);190~780nm(Air) |
| beamsplitter | Concave grating |
| grating line number | 2160 gr/mm or 1667 gr/mm or 1080 gr/mm |
| spectral range | 170-780Nm (vacuum), 190-780nm (air) |
| dispersion | 0.47Nm/mm or 0.6nm/mm or 0.93nm/mm (determined by grating) |
| Detector | PMT (Photomultipliers) |
| Slot-die | Inlet seam 20μm, outlet seam 35μm - 100μm |
| Vacuum system | Vacuum < 3Pa |
| Temperature control range | 35±0.1℃ |
| Argon system | argon saving system |
| Flow rate analysis | 4L/Min; Standby Flow rate: 0.5L/Min |
| High Voltage system | High-precision adjustable negative high Voltage module |
| Voltage fluctuation | <0.01% |
| Temperature drift | <0.0025% |
| Measurement and Control system | Parallel high-speed acquisition technology based on FPGA; analog filter digital integration circuit |
| Light source system | High-energy pre-spark technology, adjustable discharge parameters, digital control technology |
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