Taylor Hobson CCI HD Non-Contact Optical inspection 3D Profile Gauge

Introduction to the CCI HD Non-Contact Optical 3D Profiler

The CCI HD is a non-contact optical 3D profiler with the ability to measure thin and thick films. It uses a novel correlation algorithm to find the coherent peaks and phases of the interferogram generated by our precision optical scanning device. The new CCI HD combines the world's leading non-contact dimensional measurement with specialized thick film measurement technology.

In addition to the dimensional and roughness measurement capabilities, the CCI HD also offers two types of film thickness measurements. In recent years, thick film analysis has been used to study translucent coatings up to a thickness of about 1.5 microns, and the thickness limits measured depend on the refractive index of the material and the NA of the subject. Measuring thinner coatings proved to be more difficult.

Interferometry can now be used to study thin film coatings up to 50 nanometers thick, again depending on the refractive index. With this new method, properties such as film thickness, interfacial roughness, pinhole defects, and peeling of thin coating surfaces can be investigated in a single measurement.

Advantages of CCI HD Non-Contact Optical 3D Profiler:

2048 x 2048 pixel array, wide field of view, high resolution

Resolution of 0.1 angstroms at full scale

Suitable for surface reflectivity from 0.3% to 100%.

RMS repeatability < 0.2 angstroms, step height repeatability < 0.1%

Multilingual version of 64-bit control and analysis software

Illustration of CCI HD non-contact optical 3D profiler

[Note] Because the manufacturer's packaging may be updated or upgraded, the detailed packaging list shall be subject to the latest standard configuration of the manufacturer.