| Measurement range | Z-axis (vertical): 640μm (-320μm~ 320μm); X-axis (horizontal): 17.5mm (0.69 inch) |
| resolution | Z-axis (vertical): 0.002μm/+/- 20μm; 0.004μm/+/- 40μm; 0.008μm/+/- 80μm; 0.020μm/+/- 160μm |
| Measurement parameter | Ra Rz Rq Rt Rc Rp Rv R3z R3y Rz(JIS)Ry Rs Rsk Rku Rmax Rsm Rmr RPc Rk Rpk Rvk Mr1 Mr2 |
| Measurement standard | ISO4287 international standard; ANSI B46.1 American standard; DIN4768 German standard; JIS B601 Japanese standard |
| Measurement graphics | Linear dispersion, asperity original profile, filtered waveform |
| filter | RC,PC-R C,Gauss,D-P |
| Sampling length (Ir) | 0.25,0.8,2.5mm |
| Rating Length (In) | Ln=Ir×n n=1~5 |
| Sensors Measurement principle: | Displacement Differential Inductance |
| Sensors stylus: | Natural diamond, 90 ° cone angle, tip radius 5μm |
| Sensors Force: | Stylus force measurement: 4mN; Guide force measurement: < 400mN |
| Sensors Guide: | Carbide, slide direction radius 40mm |
| Sensors slide speed: | Ir = 0.25, Vt = 0.135mm/s Ir = 0.8, Vt = 0.5mm/s; Ir = 2.5, Vt = 1mm/s returns Vt = 1mm/s |
| Indication Accuracy | 0.001μm |
| error of indication | +/- (5nm + 0.1A) A: Standard value of multi-reticle template parameter Ra |
| Indication Repeatability (Variability) | Not more than 3% |
| residual contour | Not more than 0.010μm |
| Charging Voltage | 2600mAh lithium-ion battery, |
| Host Dimensions | 155×145×58mm |
| Driver Dimensions | 23×27×115mm |
| Adjustable height of bracket | 40mm |
| Weight | About 1000g |
| Operating Environment | Temperature: -20 ℃~ 40 ℃ Humidity: < 90% RH |
| Storage and transportation environment | Temperature: -40 ℃~ 60 ℃ Humidity: < 90% RH |
Warranty days: 365 days