GB/T 32996-2016 "Analysis of Metal Oxide Films by Glow Discharge Emission Light Spectrum Method for Surface Chemical Analysis" stipulates a method for determining the thickness, mass per unit area and chemical composition of metal oxide films by Glow discharge Emission Light Spectrum Method. This method is suitable for metal oxide films with a thickness of 1 nm10000 nm, and can detect a variety of metal elements such as iron, chromium, nickel, copper, titanium, and non-metallic elements such as oxygen, carbon, and nitrogen. The standard is equivalent to the international standard ISO/TS 25138:2010, which is centralized by the National Technical Committee for Standardization of Surface Chemical Analysis. It was released on October 13, 2016 and implemented on September 1, 2017.