SJ/T 11183-2022 "General Specification for Swirl/spin Coating Equipment" is a Chinese electronics industry standard that specifies the definition of terms, technical requirements, test methods, inspection rules and markings, Encasement, transportation and storage of swirl/spin coating equipment. It is applicable to swirl/spin coating equipment in pan-semiconductor MNT processing lithography process. The standard is centralized by the National Technical Committee for Standardization of Semiconductor Equipment and Materials, drafted by Shenyang Xinyuan Microelectronic Equipment Co., Ltd. and China Electronics Technology Standardization Research Institute. It was released on October 20, 2022 and implemented on January 1, 2023. It replaces the SJ/T 11183-1998 standard.
| Status | Active | ||
|---|---|---|---|
| CCS | ICS | ||
| Release Date | 2022-10-20 00:00:00 | Implementation Date | 2023-01-01 00:00:00 |