This standard specifies terms and definitions, construction and basic parameters, general requirements, main performance tests, mass assessment and marking, Encasement, transport and storage of chiller cryopumps. Applicable to external ammonia chiller cryopumps. A series of related standard documents are cited, including Encasement storage and transportation marks, vacuum technical terms, argon, pure hydrogen, pure nitrogen and vacuum pump safety requirements, etc. Terms and definitions include pumping rate, ultimate pressure, minimum Working pressure and cooling time.
This summary is not the original standard text and is for reference only. For accurate information, please obtain it through official channels.
| Status | Active | ||
|---|---|---|---|
| CCS | (J78) 真空技术与设备 | ICS | (23.160) 真空技术 |
| Release Date | 2011-08-15 00:00:00 | Implementation Date | 2011-11-01 00:00:00 |