This specification specifies the general requirements, mass assurance provisions and delivery preparation of aluminum nitride (AlN) piezoelectric thin films, etc. It is applicable to layered aluminum nitride piezoelectric thin film composites. The referenced documents include standards related to Encasement, mass assurance, etc. The requirements section specifies that piezoelectric thin films should meet the requirements of this specification and the corresponding detailed specifications. According to different applications, different structures can be used, such as Mo/AlN/Mo/Si structures, etc. The raw materials should be preferentially selected materials that have passed the inspection of military standards. The purity of raw materials such as aluminum, nitrogen and argon is required to be greater than or equal to 99.999%.