The GB/Z 43684-2024 standard specifies the description, measurement and dimensional mass parameters of gratings in the field of nanotechnology. The standard provides a detailed definition of the grating structure and its dimensional measurement methods, aiming to provide uniform technical requirements for the design, manufacture and application of gratings. By specifying the geometric parameters, Optical inspection characteristics and dimensional mass indicators of gratings, the standard helps to ensure high accuracy and high performance of gratings in nanotechnology and related fields. The standard also covers requirements for test methods and measurement tools used to evaluate the performance of gratings, ensuring the accuracy and conformity of test results. This standard is of great significance for promoting the progress of nanotechnology and enhancing the application of gratings in MNT processing, Optical inspection devices and other fields.