The GB/T 43661-2024 standard specifies the definition and calibration method of the spatial resolution of Electric Scanning Probe Microscopy (ESPM, such as SSRM and SCM) when scanning probe microscopy (SPM) is used for two-dimensional dopant imagery and other purposes in surface chemical analysis. The standard provides a unified spatial resolution measurement standard for research in the fields of electronics and materials science. The standard elaborates the working principle, operation requirements and how to accurately determine the spatial resolution of Microscope to ensure high accuracy measurement results in practical applications. Through standardized calibration methods, users can effectively verify the performance of equipment, thereby improving the conformity and reliability of measurement, and promoting the wide application of this technology in nanoscience, semiconductors, surface analysis and other fields