The ISO 13424 standard specifies the reporting requirements for the results of thin film analysis when surface chemical analysis is carried out using X-Rays photoelectron spectroscopy (XPS) technology. The standard provides a standardized reporting framework for analyzing the chemical composition of thin film surfaces, ensuring the transparency and conformity of experimental results. Relevant data for thin film analysis such as elemental composition, chemical state, depth distribution, etc. are included in the standard, and the format and content of the report are specified in detail in order to accurately convey the analysis results. ISO 13424 is of great significance for the application of surface analysis in the fields of materials science, electronics, nanotechnology, etc., helping to ensure the Reliability and comparability of thin film surface properties in various industrial and scientific research applications.