The ISO 11505 standard specifies the general procedure for the in-depth analysis of quantitative components in surface chemical analysis by Glow discharge Light spectrum (GD-OES). This method is suitable for the analysis of the chemical composition of the surface layer of various materials. The in-depth analysis of the sample by Glow discharge Light spectrum instrument can provide accurate surface element distribution information. The standard covers the key steps in the analysis process, including equipment requirements, operating procedures, data collection and processing methods, etc., to ensure the accuracy and repeatability of the in-depth analysis results. The method is widely used in materials science, the semiconductor industry, and Miscellaneous fields that require in-depth understanding of the surface and interface structure of materials.