The "GB/T 33826-2017 Stylus Profile Gauge Method for Film thickness measurement of nano thin films on Glass substrates" standard specifies the principle, instrument requirements, test environment and steps for the measurement of film thickness of nano thin films on Glass substrates using Stylus Profile Gauge. This standard applies to nano thin films with a measurement Film thickness in the range of 10 nm to 1000 nm, especially in the case of steps that exist or can be etched between the film and the substrate. The standard provides detailed test methods and reporting requirements to ensure the accuracy and reliability of measurement. At the same time, the standard also applies to nano thin film thickness measurement of Miscellaneous hard planar substrates.