GB/T 36053-2018 "X-ray reflection method for measurement of film thickness, Density and interface width, instrument requirements, collimation and positioning, data collection, data analytics and reports", clarifies the use of X-ray reflection method for measurement of film thickness, Density and interface width, instrument equipment, collimation positioning, data collection analysis and report writing requirements and specifications, to provide a standardized process for the measurement method, to ensure the accuracy and reliability of measurement results, help film performance testing scientific development.
This summary is not the original standard text and is for reference only. For accurate information, please obtain it through official channels.
| Status | Active | ||
|---|---|---|---|
| CCS | G04 | ICS | 71.040.40 |
| Release Date | 2018-03-15 00:00:00 | Implementation Date | 2019-02-01 00:00:00 |