This standard specifies the requirements, test methods, inspection rules and marks, Encasement, transportation, storage and order contents of high-purity aluminum and aluminum alloy sputtering targets for the preparation of electronic thin films. It is suitable for all kinds of high-purity aluminum and aluminum alloy targets for the production of electronic thin films, covering the fields of semiconductor wiring, semiconductor packaging, flat panel displays and solar cells.
This summary is not the original standard text and is for reference only. For accurate information, please obtain it through official channels.
| Status | Active | ||
|---|---|---|---|
| CCS | H61 | ICS | 77.120.10 |
| Release Date | 2013-09-06 00:00:00 | Implementation Date | 2014-05-01 00:00:00 |