GB/T 15870-1995 "Chromium Film for Hard Surface Photomasks" stipulates the technical requirements of chromium film for hard surface photomasks. The standard covers the performance indicators of chromium film, including Film thickness, uniformity, surface mass, Optical inspection characteristics, etc., and clarifies inspection methods and acceptance rules. It provides a technical basis for the production, quality control and use of chromium film for hard surface photomasks, which helps to ensure the mass and performance of photomask products and promote the standardization of related industries.
This summary is not the original standard text and is for reference only. For accurate information, please obtain it through official channels.
| Status | Active | ||
|---|---|---|---|
| CCS | L97 | ICS | 31.030 |
| Release Date | 1995-12-22 00:00:00 | Implementation Date | 1996-08-01 00:00:00 |