GB/T 34481-2017 "Low Dislocation Density Germanium Single Wafer Corrosion Pit Density (EPD) measurement method" specifies the method for measuring the corrosion pit Density (EPD) of low dislocation Density Germanium single wafers. The standard applies to round germanium single wafers with a dislocation Density of less than 1000 pcs/cm ² and a diameter of 75 mm to 150 mm. During the test, the germanium single wafer showed dislocation corrosion pits through chemical corrosion, and then the number of corrosion pits in the field of view was observed through a microscope to calculate the dislocation Density. This method is mainly used for the mass evaluation of three germanium single wafers: 0 °, (100) partial (111) 6 ° and (100) partial (111) 9 °, providing a standardized test method for scientific research and production in related fields.