This standard specifies a test method for the determination of trace metals (copper, zinc, nickel, iron, lead, sodium and potassium) in electronic grade water using flameless or flame Atomic absirption spectroscopy-tometry, AAS. For EW-I to EW-II electronic grade water, the Sensitivity of the detection method must meet the specified requirements. The standard also allows the use of Miscellaneous instruments with equivalent Sensitivity such as Inductance Coupled Inductively Coupled Plasma Mass Spectrometer (ICP-MS) for measurement. This standard provides an accurate and reliable analytical method for the detection of metal traces in electronic grade water, ensuring that the water quality meets high purity requirements.