This standard describes the Measurement characteristics of Optical inspection Confocal Microscope in three-dimensional surface shape measurement, and specifies the method of measurement uncertainty evaluation, especially the indication reading method of transverse and axial measurement results. The standard is applicable to Optical inspection Confocal Microscope in industrial measurement, covering surface topography measurement from macroscopic to microscopic. The standard defines the basic concepts of confocal microscopy in detail, including illumination mode, detection mode, Optical inspection tomography capability, etc., providing technical guidance for the measurement and uncertainty evaluation of Optical inspection Confocal Microscope.