This standard specifies the inspection method of Scanning Electron Microscope (SEM) and X-ray energy spectrometer (EDS), which is mainly used for the physical and chemical inspection of trace physical evidence in the field of criminal technology. The standard details the operation principle of SEM and EDS, Sample Handling and Data analysis methods under environment conditions, and proposes technical specifications for application in criminal technology. Miscellaneous field can also refer to this standard to ensure the accuracy and Reliability of trace physical evidence analysis.