GB/T 34972-2017 "Determination of metal content in gases used in the electronics industry" Inductance-coupled plasma Mass spectrometry "specifies a method for the determination of metal element content in gases used in the electronics industry by Inductance-coupled plasma Mass spectrometry (ICP-MS). The standard is applicable to the analysis of metal impurities in various gases used in the electronics industry, such as oxygen, nitrogen, hydrogen, helium, etc., to ensure that the gas purity meets the high requirements of the electronics industry. The standard provides a technical basis for the quality control and testing of gas products.
This summary is not the original standard text and is for reference only. For accurate information, please obtain it through official channels.
| Status | Active | ||
|---|---|---|---|
| CCS | G86 | ICS | 71.040.40 |
| Release Date | 2017-11-01 00:00:00 | Implementation Date | 2018-02-01 00:00:00 |