GB/T 34326-2017 focuses on depth profiling in surface chemical analysis. The standard specifies the Ion beam alignment method for Auger electron spectroscopy (AES) and X-Rays photoelectron spectroscopy (XPS) depth profiling to ensure that the Ion beam acts accurately on the sample. At the same time, it specifies the beam or beam density Measuring method, covering the required instrumentation, operation procedures and calculation methods. These specifications provide guarantees for accurate depth profiling data, help researchers and related practitioners obtain reliable results in the field of material analysis, and promote the standardization and precision development of surface chemical analysis technology.
This summary is not the original standard text and is for reference only. For accurate information, please obtain it through official channels.
| Status | Active | ||
|---|---|---|---|
| CCS | G04 | ICS | 71.040.40 |
| Release Date | 2017-09-29 00:00:00 | Implementation Date | 2018-08-01 00:00:00 |