GB/T 34174-2017 belongs to the surface chemical analysis standard, which is aimed at the dosing value of the dwelling surface produced by ion implantation in the working reference material. It gives recommended procedures, covering reference material preparation, ion implantation operation specifications, and dwelling surface dosimetry methods and calculation processes, and clarifies the key elements such as required instruments and equipment, Measurement conditions, etc. The standard provides a unified method for accurately determining the dwelling surface dose in related fields, which helps to improve the accuracy and Reliability of surface chemical analysis data. It has important guiding significance for the work involving ion implantation in scientific research and production, and promotes the standardization of industry technology.
| Status | Active | ||
|---|---|---|---|
| CCS | G04 | ICS | 71.040.40 |
| Release Date | 2017-09-07 00:00:00 | Implementation Date | 2018-08-01 00:00:00 |