This standard specifies the use of Ion chromatography for the determination of trace anions in electronic grade water, including the content of fluorine, chlorine, nitrite, bromine, nitrate, phosphoric acid and sulfate. This method is suitable for quality control of high-purity electronic grade water and provides accurate detection means to ensure the purity of water quality during electronic manufacturing. This standard also details the principle, instrument configuration and test conditions of Ion chromatography.
This summary is not the original standard text and is for reference only. For accurate information, please obtain it through official channels.
| Status | Active | ||
|---|---|---|---|
| CCS | L90 | ICS | 31.030 |
| Release Date | 2013-12-31 00:00:00 | Implementation Date | 2014-08-15 00:00:00 |