GB/T 15862-2012 standard specifies the terminology, product classification, technical requirements, test methods, inspection rules, and specifications for marking, Encasement, transport and storage of ion implanters. This standard is mainly applicable to electrical energy ion implanters for semiconductor processes, but also to Miscellaneous ion implanters. The standard provides detailed requirements on equipment performance, including definitions of beam energy and beam current density, and specifies requirements for equipment during Encasement and transport to ensure mass and Reliability of equipment.
This summary is not the original standard text and is for reference only. For accurate information, please obtain it through official channels.
| Status | Active | ||
|---|---|---|---|
| CCS | L97 | ICS | |
| Release Date | 2012-11-05 00:00:00 | Implementation Date | 2013-02-15 00:00:00 |