The GB/T 15861-2012 standard specifies the terminology, product classification, technical requirements, test methods, inspection rules for Ion beam etching machines, as well as relevant specifications for Encasement, transportation and storage. This standard applies to general-purpose Ion beam etching machines with physical sputtering corrosion and can be used as a reference for Miscellaneous-specific Ion beam etching machines. By clearly defining terms and detailed technical requirements, the standard aims to ensure the performance and Reliability of Ion beam etching machines, while providing specifications for Encasement and transportation to ensure the safety of equipment during transportation and storage.