The GB/T 25755-2010 standard specifies methods for the measurement of performance parameters of sputtered ion pumps, for ion pumps with nominal volumetric flow rates greater than 10L/s. The standard covers a pressure range from 1.5 × 10 ³ Pa to 1 × 10 Pa, ensuring that the measurement of performance parameters is carried out under the same conditions so that measurement results from different manufacturers or laboratories are comparable. The standard defines key terms such as ultimate pressure (the minimum pressure the pump can achieve) and minimum working pressure (the minimum pressure the pump will have within 48 hours of closing the intake valve). Measuring methods are used to improve the accuracy and conformity of sputtering ion pump performance tests.
| Status | Active | ||
|---|---|---|---|
| CCS | J78 | ICS | 23.160 |
| Release Date | 2010-12-23 00:00:00 | Implementation Date | 2011-10-01 00:00:00 |