GB/T 23364.4-2009 standard specifies the determination method of aluminum, iron, copper, zinc, cadmium, lead and thallium in high purity indium oxidation. This part adopts Inductance Coupled Plasma Mass Spectrometry (ICP-MS), which is suitable for the determination range of mass fraction of these elements: aluminum, iron, zinc, lead is 0.00005%~ 0.0040%, copper, cadmium, lead, thallium is 0.00002%~ 0.0040%. After the sample is dissolved by nitric acid, aluminum and iron are measured with scandium as internal standard, and copper, zinc, cadmium, lead and thallium with rhodium as internal standard. When measuring, aluminum and iron use collision/reaction cell working mode, while Miscellaneous elements use high salt resistant interface in normal working mode. This method ensures the accurate determination of trace elements in high purity indium oxidation.