This standard specifies the technical requirements, inspection rules, test methods, marking, Encasement, transportation and storage requirements for electronic grade fluoromethane, which is applicable to electronic grade products prepared for purification by industrial fluoromethane. The standard provides technical specifications for fluoromethane products in the field of electronic gases to ensure their purity and Stability in high-tech fields such as semiconductor manufacturing.
This summary is not the original standard text and is for reference only. For accurate information, please obtain it through official channels.
| Status | Active | ||
|---|---|---|---|
| CCS | G86 | ICS | 71.100.20 |
| Release Date | 2021-08-20 00:00:00 | Implementation Date | 2022-03-01 00:00:00 |