This standard specifies the technical requirements and test methods for vacuum evaporation, sputtering, ion plating and other vacuum coating equipment with pressures in the range of 10 ^ -5 Pa to 10 ^ -3 Pa. It covers the requirements for inspection rules, marking, Encasement, transportation and storage of equipment. It is suitable for the preparation of metal and Non-metallic film layers on various types of plastics, Glass and other substrates, and is an important standard in the field of vacuum technology.
This summary is not the original standard text and is for reference only. For accurate information, please obtain it through official channels.
| Status | Active | ||
|---|---|---|---|
| CCS | J78 | ICS | 23.160 |
| Release Date | 2011-11-21 00:00:00 | Implementation Date | 2012-03-01 00:00:00 |