GB/T 11164 - 1999 Specifies the general technical conditions for vacuum coating equipment. The standard covers equipment design and manufacture, performance indicators, safety and environmental protection, etc. The key performance requirements such as equipment vacuum degree and air extraction rate are clarified, and the uniformity of coating and thickness control accuracy are also stipulated. At the same time, guidelines are put forward in terms of electrical safety, noise control, and operation convenience. Following this standard can ensure the mass stability and reliability of vacuum coating equipment, meet the coating needs of different industries, and promote the application and development of vacuum coating technology in material processing, Optical inspection and other fields.