This standard specifies the technical requirements, test methods, inspection rules, marking, Encasement, transportation, storage accompanying documents and order contents of trichlorosilicon for silicon epitaxy (SiHCl 3). It is applicable to trichlorosilicon products for silicon epitaxy prepared by refining and purifying trichlorosilicon as raw material.
This summary is not the original standard text and is for reference only. For accurate information, please obtain it through official channels.
| Status | Active | ||
|---|---|---|---|
| CCS | H83 | ICS | 29.045 |
| Release Date | 2023-08-06 00:00:00 | Implementation Date | 2024-03-01 00:00:00 |