GB/T 42659-2023 is aimed at scanning probe microscopy in surface chemical analysis. It focuses on standardizing the calibration method of measurement systems when measuring geometric quantities using Scanning Probe Microscopy. Clarify the scope of application of calibrate, covering a variety of Scanning Probe Microscopy types. Detail the characteristics and selection principles of standard samples required for calibrate, and specify the calibrate process, including instrument parameter setting, measurement procedures and Data processing methods. Through accurate calibrate, ensure the accuracy of Scanning Probe Microscopy measurement geometric quantities, provide reliable data support for surface chemical analysis, and help related work in scientific research, industrial testing and other fields.