This document specifies the methods for testing the resistivity of silicon single crystals by straight row four-probe method and direct current two-probe method. It is suitable for resistivity measurement of different types of silicon single crystals to ensure Test accuracy and reliability of results.
This summary is not the original standard text and is for reference only. For accurate information, please obtain it through official channels.
| Status | Active | ||
|---|---|---|---|
| CCS | H21 | ICS | 77.040 |
| Release Date | 2021-05-21 00:00:00 | Implementation Date | 2021-12-01 00:00:00 |