Spin Coater

A 4-station Spin Coater for 40mm diameter silicon wafers, each station can operate independently to meet the needs of different silicon diameters. Speed range of stations is wide, soft start can be adjusted, and the glue leveling process is automatically controlled. Touch screen display and control, 12 sets of process parameters can be pre-stored, each set of 5 segments, easy to operate.

Maximum support 12 inches, touch screen with program control, with foot switch, with Modbus-RTU communication interface, formula with power-down protection function, mouse and keyboard interface, insufficient adsorption alarm and interlocking safety mechanism, maximum speed 6000rpm, distribution center alignment tool.