CHINA 10A-4 touch screen four-station Spin Coater
A 4-station Spin Coater for 40mm diameter silicon wafers, each station can operate independently to meet the needs of different silicon diameters. Speed range of stations is wide, soft start can be adjusted, and the glue leveling process is automatically controlled. Touch screen display and control, 12 sets of process parameters can be pre-stored, each set of 5 segments, easy to operate.
HuiNuo
10A-4
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Function
1. Use 4 workstations to evenly glue silicon wafers with a diameter of 40mm (the wafer holder can be selected from 5-100mm). The silicon wafers are fixed by suction cups on the workstations.
2. The workstation speed control range is 100-7000 rpm, and the accuracy is ±1%.
Starting method is soft start, the soft start level is infinitely adjustable (acceleration setting range 100-3000 rpm), Acceleration time from 0-7000 rpm is 3-80 seconds .
3. The time control range of each period is 0-3000 seconds. Accuracy ±0.1%.
4. 12 groups of process parameters can be pre-stored, each group has 5 segments.
5. Automatically control the glue leveling process. Place the silicon wafer manually and press the start button to complete the glue dispersion process.
6. The workbench has an exhaust function.
7. Each work station can operate independently, and vacuum and spin coating are interlocked.
8. Each workstation has a 4.3-inch resistive touch screen display and control with a protective film.
HuiNuo 10A-4 Touch screen four-station glue leveling machineSpecifications
| LIST | VALUE |
|---|---|
| loading diameter | 5/10/20/30.... 100mm optional (2 as standard) |
| program control | 1-5 paragraphs (edit pages), 12 groups; |
| homogenizing time | 3000S, resolution 0.1S, Accuracy +/- 0.1% |
| Speed range | 100~7000rpm |
| speed correction | Rotation speed can be automatically corrected by selecting Kx practice run through A/K, and then go back to Kx to use |
| Acceleration range | 100-4000rpm/s |
| Power supply Voltage | AC200-230V, single phase, 200W |
| Dimension | 990*740*1620mm |
| Purification function parameters | 1000 cubic meters per hour |
| Air purification technology | HEPA efficient filtrate technology |
| purification rate | 99.99 |
| Primary Filter Specifications and Quantity | 490*490*20 |
| High Efficiency Filter Specifications and Quantity without Shelf | 820*600*50 |
| Speed Accuracy | ±1% |
HuiNuo 10A-4 Touch screen four-station glue leveling machine Packing list
machine X1, manual X1, certificate X1, warranty card X1
[Note] Because the manufacturer's packaging may be updated or upgraded, the detailed packaging list shall be subject to the latest standard configuration of the manufacturer.