SANYAN SYSC-100B high-precision programmable homogenizer Spin Coater 10,000

One.    Applications

SYSC-100B high-precision program-controlled homogenizer (Spin Coater), also known as rotary coating instrument, is a new generation of rotary coating equipment. It has the characteristics of high speed accuracy, stable speed, controllable rotational acceleration, and multi-stage program control of the homogenizing process. It is mainly used for surface coating processes in the fields of microelectronics, semiconductors, solar cells, new energy, biomaterials, optical devices, etc., such as the preparation of various nano thin film materials, photoresist coatings, and biological functional coatings.

2. Product features

1. The rotary motor adopts a precision high-speed servo motor specially designed for the homogenizer, which has high precision, high stability and high reliability.

2. Excellent rotational acceleration performance, the maximum rotational acceleration can reach 50000rpm/s (real acceleration with load).

3. Two safety interlock functions:

 (1) The homogenizing cavity has the detection function of opening and closing, so as to ensure that the cavity can be started only after it is closed, so as to prevent personal injury caused by flyers during the homogenization process;

 (2) The vacuum suction sheet has a vacuum detection function, and if a vacuum leak occurs and the substrate cannot be firmly adsorbed, the operation will be stopped immediately.

4. The shell is made of SUS304 stainless steel, which is anti-corrosion, rust-free and easy to clean.

5. The homogenizing cavity is made of German Röchling NPP material, which is molded by CNC integrated processing. Pick up and store the glue that is detached from the substrate to avoid entering the vacuum line and the inside of the equipment. Corrosion-resistant and easy to clean.

6. The rotary suction table is made of German Röchling PEEK material, which is processed by CNC integration. High temperature resistance, corrosion resistance, no deformation.

7. Fully automatic segmentation program control of the homogenizing process. The whole homogenization process can be divided into up to ten stages, and the acceleration time, rotation speed and homogenization time of each section can be precisely controlled and continuously adjusted. 50 sets of process programs can be stored and recalled at any time.

8. 7-inch LCD touch screen makes the control more convenient, and the running status and various parameters are displayed in real time, so that the process of homogenization can be understood more intuitively.

9. The opening and closing of the Vacuum Pump are automatically programmed, no manual operation is required.

10. Add a pre-suction step before rotation, and the "pre-suction time" is up to 99s, to ensure that the substrate is firmly adsorbed on the rotating table before rotating the coating. After the homogenization is completed, the desorption sheet step is added, and the "desorption tablet time" is up to 99s, so as to ensure that the vacuum is cut off after the safe stop, and the substrate is released to prevent the substrate from slipping off after the coating film and causing damage to the film layer.

11. Standard oil-free Vacuum Pump, low noise. The high suction force adheres the substrate tightly to the rotary table, preventing flyers.

3. Technical parameters

*The maximum spin coating acceleration is the real acceleration under load (using ≤ Ø50mm substrate).

[Note] Because the manufacturer's packaging may be updated or upgraded, the detailed packaging list shall be subject to the latest standard configuration of the manufacturer.